학술논문
A New High-Sensitivity Differential X-Axis FM Accelerometer
Document Type
Conference
Author
Source
2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2023 Joint Conference of the European. :1-4 May, 2023
Subject
Language
ISSN
2327-1949
Abstract
SummaryIn this work, we propose an innovative high-performance Micro-Electro-Mechanical Systems (MEMS) z-axis Frequency Modulation (FM) accelerometer able to achieve a sensitivity higher than 1000 Hz/g around a carrier value of 180 kHz, with a 1120x608 µm 2 footprint only. The new device exploits the mechanical stiffness modulation induced on two in-plane flexural resonators by the torsional deformation of the two proof mass suspension springs to differentially measure an external z-axis acceleration. This concept, enabled by the Thelma-Double process by STMicroelectronics, is successfully demonstrated through preliminary experimental tests.