학술논문
Influence of substrate thickness on the responsivity of antenna-coupled THz microbolometers
Document Type
Conference
Author
Source
2016 41st International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz) Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2016 41st International Conference on. :1-1 Sep, 2016
Subject
Language
ISSN
2162-2035
Abstract
We report on the influence of substrate thickness on the performance of antenna coupled microbolometers for terahertz (THz) detection. Planar antennas with NbsNó microbolometers were fabricated on silicon substrates. Detected voltages of these antenna-coupled microbolometers are altered with a periodic variation from 0.5 THz to 0.75 THz, which is accorded with the reflection of the substrate. By placing a piece of movable metallic slab behind the device, which results in a tunable thickness of the substrate, we can improve the voltage responsivity of the device at a given frequency.