학술논문
Al(1−x)Sc(x)N thin films as promising non-ferroelectric materials for energy harvesting
Document Type
Conference
Author
Source
2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the. :59-61 Jul, 2013
Subject
Language
ISSN
1099-4734
2375-0448
2375-0448
Abstract
We report on microstructure evolution and enhancement of longitudinal and transverse piezoelectric responses of AlN thin film with partial substitution of Al 3+ ions by Sc 3+ ions. Piezoelectric AlScN alloys are very promising for energy harvesting and sensor applications. AlScN 83/87 alloys exhibit a figure of merit that allows for a 60% efficiency increase as compared to pure AlN.