학술논문

High-Toughness Aluminum-N-Doped Polysilicon Wiring for Flexible Electronics
Document Type
Conference
Source
2022 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS) Flexible and Printable Sensors and Systems (FLEPS), 2022 IEEE International Conference on. :1-4 Jul, 2022
Subject
Bioengineering
Engineering Profession
General Topics for Engineers
Wiring
Resistance
Wires
Aluminum
Bending
Conductivity
Sensor systems and applications
flexible interconnects
transfer-printing
aluminum N-doped polysilicon interconnects
bend testing
Language
Abstract
One of the essential requirements of any flexible substrate electronic system is the availability of reliable, high density, fine pitch interconnects between components. In this work, we demonstrate a high-toughness two-layer (aluminum, N-doped polysilicon) composite wiring scheme. The top aluminum layer carries most of the current while the polysilicon underlayer electrically bridges any cracks present on the top aluminum induced by flexing thus maintaining electrical conductivity even at very high stresses. When composite and Al control wires on a flexible tape were subject to 4000 cycles of bending, we observed that Al control wires fracture at a 2.5 mm radius of curvature but the composite wires maintain electrical conduction with an increased resistance.