학술논문

Tuning endotaxial growth of CoSi2 nanowires and nanodots
Document Type
Conference
Source
2018 IEEE 8th International Nanoelectronics Conferences (INEC) Nanoelectronics Conferences (INEC), 2018 IEEE 8th International. :35-36 Jan, 2018
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Nanowires
Morphology
Temperature measurement
Surface morphology
Surface treatment
Kinetic theory
Energy barrier
Language
ISSN
2159-3531
Abstract
The shape transition of the CoSi2 islands from nanowire to nanodot and vice versa can be controlled by using different growth temperatures. High growth temperatures favor the formation of ridge nanowires and flat square-nanodots. At lower growth temperatures, the nanowires become more dot-like while flat nanodots are more wire-like. The islands' length, width and height follow the Arrhenius relation with activation energies ranging from 0.4 – 1.6 eV. The shape-transition of these nanowires and nanodots are kinetically limited by thermally-activated processes.