학술논문

Widefield Heterodyne Optical Coherence Microscopy for Volumetric Vibration Imaging
Document Type
Conference
Source
2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2022 Conference on. :1-2 Jul, 2022
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Vibrations
Time-frequency analysis
Visualization
Frequency modulation
Microscopy
Phase frequency detectors
Tomography
Language
Abstract
We propose a method for simultaneous tomographic vibration visualization of an entire volume of a target object using a scanning low-coherence interferometric microscope. By combining the difference frequency component produced by the phase modulated reference beam and the object vibration into the time-domain OCT signal, we could capture the internal vibration distribution at a frequency of 43 kHz, which far exceeds the frame rate of the CMOS image sensor as a detector, with 25 nm sensitivity.