학술논문
MEMS Shock Absorbers Integrated with Al2O3-Reinforced, Mechanically Resilient Nanotube Arrays
Document Type
Conference
Author
Source
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :45-48 Jan, 2023
Subject
Language
ISSN
2160-1968
Abstract
This paper presents MEMS-integrated nanotube arrays as an in-plane shock absorber to ensure device reliability to external mechanical shocks. The geometrically structured nanotube arrays, consisting of vertically-aligned carbon nanotubes (CNTs) coated with alumina (Al 2 O 3 ) layer, are directly integrated onto designated areas, allowing them to be compatible with conventional batch-fabrication processes for MEMS. The deformable carbon nanotube arrays with an exceptionally high aspect ratio dissipate the abruptly applied kinetic energy, while the reinforcing Al 2 O 3 layer provides outstanding mechanical resilience to withstand extreme deformations. Therefore, in the shock-drop test, specimens with the nanotube arrays showed approximately 115 % and 80 % higher survival rate (with an average fracture acceleration of 10,000 g) compared to control groups (without the nanotubes) with a hard stop and compliant spring-based shock absorbers, respectively.