학술논문

High-Overtone Bulk Acoustic Resonator (HBAR) as Passive Sensor: Towards Microwave Wireless Interrogation
Document Type
Conference
Source
2012 IEEE International Conference on Green Computing and Communications Green Computing and Communications (GreenCom), 2012 IEEE International Conference on. :631-636 Nov, 2012
Subject
Computing and Processing
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Resonant frequency
Radar
Acoustics
Wireless sensor networks
Wireless communication
Frequency modulation
wireless
sensor
high overtone bulk acoustic resonator
HBAR
microwave
RADAR
Language
Abstract
Increasing the operating frequency of wireless passive sensors is suitable for reducing the global sensor size currently dominated by antenna dimensions, and for improved directivity of the probe electromagnetic signal with either electronic or mechanical beam sweeping by the reader for space domain multiplexing. While surface acoustic wave (SAW) transducers patterned on piezoelectric substrate are one of the standard approach for passive wireless sensing, their operating frequency is limited by lithography resolution. One alternative approach to increase the operating frequency is to exploit bulk acoustic resonators operating at high overtone -- the so-called HBARs. Furthermore, In this paper, the interrogation of such devices is demonstrated either in the time domain (delay line) or frequency domain (resonator), taking advantage of their spectral characteristics, i.e. a comb of modes in the frequency domain, or a comb of time-domain reflections.