학술논문
Numerical simulation of silicon grating-based plasmonic sensor
Document Type
Conference
Source
2022 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) Numerical Simulation of Optoelectronic Devices (NUSOD), 2022 International Conference on. :189-190 Sep, 2022
Subject
Language
ISSN
2158-3234
2158-3242
2158-3242
Abstract
This work reports on the application of silicon grating-enabled nanostructure for refractive index sensing application in the near-infrared region. This grating helps in launching the plasmon modes efficiently towards the flat metal film deposited with a thin Al 2 O 3 layer. The normal incidence light is used which can be helpful for its integration with optical fiber. Numerical simulation is performed using the rigorous coupled-wave analysis (RCWA) method. The proposed structure has shown sensitive and precise sensing behavior.