학술논문

Numerical simulation of silicon grating-based plasmonic sensor
Document Type
Conference
Source
2022 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) Numerical Simulation of Optoelectronic Devices (NUSOD), 2022 International Conference on. :189-190 Sep, 2022
Subject
Components, Circuits, Devices and Systems
Computing and Processing
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Reflectivity
Sensitivity
Two dimensional displays
Refractive index
Plasmons
Numerical simulation
Silicon
grating
RCWA
sensing
plasmon
Language
ISSN
2158-3234
2158-3242
Abstract
This work reports on the application of silicon grating-enabled nanostructure for refractive index sensing application in the near-infrared region. This grating helps in launching the plasmon modes efficiently towards the flat metal film deposited with a thin Al 2 O 3 layer. The normal incidence light is used which can be helpful for its integration with optical fiber. Numerical simulation is performed using the rigorous coupled-wave analysis (RCWA) method. The proposed structure has shown sensitive and precise sensing behavior.