학술논문
Novel membrane-less two-way MEMS loudspeaker based on piezoelectric dual-concentric actuators
Document Type
Conference
Author
Source
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :2047-2050 Jun, 2017
Subject
Language
ISSN
2167-0021
Abstract
In this paper a novel type of piezoelectric MEMS loudspeaker is presented. The device concept is based on concentrically cascaded PZT actuators making it the first two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane offering significant improvements with respect to acoustic performance, energy efficiency and manufacturability. Extensive FEA studies have revealed a very high SPL of more than 85 dB at 500 Hz for a device 10 × 10 mm 2 in size. At higher frequencies even larger SPL values are achieved enabling a flat frequency response with 95 dB for frequencies above 800 Hz. Based on the concept speaker prototypes have been fabricated using MEMS technology and are currently being characterized.