학술논문
MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material
Document Type
Conference
Author
Source
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :2043-2046 Jun, 2017
Subject
Language
ISSN
2167-0021
Abstract
Ohmic MEMS switches can be operated reliable under DC load if important factors determining its reliability are considered as a whole. First of all, these are bi-directional actuation with high forces, a very low contact resistance and good heat dissipation. The present work describes the reliability of a surface-micromachined ohmic switch with gold contacts, combining all this features. Hot switching of 50mA at 10V dc is possible in ambient air for more than 50 million cycles. With a load of 10mA more than 100 million cycles have been demonstrated repeatedly.