학술논문
Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners
Document Type
Conference
Source
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. :2489-2492 Jun, 2013
Subject
Language
ISSN
2159-547X
2164-1641
2164-1641
Abstract
This paper presents modeling, fabrication and characterization of two designs of two-axis gimbal-less, thin-film PZT driven micromirrors with 1mm 2 apertures. These micromirrors reach high frequencies for piston (21 kHz) and torsional modes (28.9 kHz) and the θ opt · D product achieves up to 20.7°·mm driven by a unipolar rectangular pulse of 10 V. The combination of high frequency operation and the high driving force of the piezoelectric actuators leads to a very short reaction time. Furthermore, by combining the two adjacent torsion modes of the micromirrors circle laser beam trajectories can be realized.