학술논문

Solar-Blind Photoresistors Based on $\hbox{Mg}_{0.48} \hbox{Zn}_{0.52}\hbox{O}$ Thin Films Grown on $r\hbox{-Al}_{2} \hbox{O}_{3}$ Substrates by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy
Document Type
Periodical
Source
IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 59(7):1970-1973 Jul, 2012
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Substrates
Zinc oxide
Buffer layers
Absorption
Diffraction
X-ray diffraction
Optical buffering
%24a%24<%2Ftex><%2Fformula>-plane+MgZnO%22">$a$-plane MgZnO
photoresistor
resistance
solar blind
Language
ISSN
0018-9383
1557-9646
Abstract
Solar-blind photoresistors based on $\hbox{Mg}_{0.48}\hbox{Zn}_{0.52} \hbox{O}$ thin films were fabricated on $r$-plane sapphire substrates by radio-frequency plasma-assisted molecular beam epitaxy. High-quality $a$-plane-orientation single-phase wurtzite $\hbox{Mg}_{0.48}\hbox{Zn}_{0.52}\hbox{O}$ thin films are demonstrated by X-ray diffraction and absorption spectra. The MgZnO photoresistors exhibit a large dark/photoresistance ratio up to $\hbox{1.7} \times \hbox{10}^{4}$ with the light intensity of 0.61 $\hbox{mW/cm}^{2}$ at 260 nm. The spectral response shows a sharp response peak only in the solar-blind region with maximum responsivity of $\hbox{1.5} \times \hbox{10}^{-3}\ \Omega^{-1}\cdot\hbox{W}^{-1}$ .