학술논문
Fast Imaging Investigation on Pulsed Magnetron Discharge
Document Type
Periodical
Author
Source
IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 39(11):2482-2483 Nov, 2011
Subject
Language
ISSN
0093-3813
1939-9375
1939-9375
Abstract
A time-resolved fast imaging technique was applied for the investigation of both gas (Ar) and sputtered material (Al) excited species in a high-power short-pulse magnetron discharge.