학술논문
Accurate Series-Resistance Extraction From Capacitor Using Time Domain Reflectometry
Document Type
Periodical
Author
Source
IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 28(4):279-281 Apr, 2007
Subject
Language
ISSN
0741-3106
1558-0563
1558-0563
Abstract
For advanced CMOS technology, series resistance is an important source of error in capacitance–voltage ( $C$–$V$) measurement. Independent accurate determination of series resistance is generally not possible. Recently, we introduced a new $C$–$V$ measurement method using time domain reflectometry (TDR). Here, we show that the TDR method also allows series resistance to be determined independently and accurately.