학술논문
An empirical study of nanocrystalline graphite’s morpho-structural and electrical properties as a function of substrate temperature during PECVD synthesis
Document Type
Conference
Source
2023 International Semiconductor Conference (CAS) Semiconductor Conference (CAS), 2023 International. :275-278 Oct, 2023
Subject
Language
ISSN
2377-0678
Abstract
Their nanocrystalline structure and good electrical conductivity, makes nanocrystalline graphite thin films an asset in a wide range of applications. Their morpho-structural and electrical properties are herein studied with respect to the substrate temperature during their plasma-enhanced chemical vapor deposition. Although the thin films present similar morpho-structural properties, a significant improvement in electrical conductivity is observed for a higher growth temperature.