부산대학교 도서관

This work demonstrates that thin slots strategically placed in MEMS ring resonators are able to enhance the quality factor (Q) of the device operated in a wineglass mode in the isothermal region. The devices are optimized using COMSOL for an increased Q through increased slot size, using the Zener curve as a comparative baseline. These parts are fabricated and encapsulated in an ultra-clean environment, and tested in various temperature and pressure conditions to directly measure changes in anchor, gas, and thermoelastic dissipation across temperature. [2020-0156]