부산대학교 도서관

Chromium coatings have technological importance due to their wear resistant properties. In the past ion implantation at keV energies has been used to enhance the performance of these films. In the present work chromium films have been irradiated with 75 MeV Ni ions and the resultant change in properties studied. It is found that there is a large increase in the integrity of these films as determined in a scratch adhesion test. This observation opens up the possibility of using high energy heavy ion beams for the modification of metallic thin films. The energy deposited by the beam in the film is largely due to inelastic processes rather than elastic processes. There is the advantage that the inelastic energy deposition profile is wide, and films of thickness on the order of a micron may be treated over their entire thickness.