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Nucleation and Layer Closure Behavior of Iridium Films Grown Using Atomic Layer Deposition.

Document Type

Article

Author

Chung, Hong Keun; Kim, Han; Jeon, Jihoon; Kim, Sung-Chul; Won, Sung Ok; Harada, Ryosuke; Tsugawa, Tomohiro; Chung, Yoon Jang; Baek, Seung-Hyub; Park, Tae Joo; Kim, Seong Keun

Source

Journal of Physical Chemistry Letters; 7/20/2023, Vol. 14 Issue 28, p6486-6493, 8p

Subject

Language

ISSN

19487185

Online Access

Full Text (ACS) Web of Science JCR 저널정보 Scopus Find it@PNU

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