학술논문
Highly Transparent and Conductive Al-Doped ZnO/Ag/Al-Doped ZnO Multilayer Source/Drain Electrodes for Transparent Oxide Thin Film Transistors
Document Type
Article
Author
Source
Electrochemical and Solid State Letters; April 2011, Vol. 14 Issue: 4 pH152-H155, 4p
Subject
Language
ISSN
10990062; 19448775
Abstract
The amorphous IGZO (a-IGZO) transparent TFT with optimized AZO/Ag/AZO S/D electrodes exhibited high transparency (79.17%) in the 380-600 nm wavelength region despite the use of a metallic Ag layer due to effective antireflection. In addition, the TTFT with AZO/Ag/AZO S/D electrodes showed higher field effect mobility (uFE: 12.17 cm2/V-s) and on to off current ratio (I on/off: 9.37 x 108) than the TTFT with single AZO S/D electrodes due to a reduction in resistivity caused by insertion of the metallic Ag layer. Comparable TTFT performance of the a-IGZO based TTFT to Ti S/D electrodes indicates that the AZO/Ag/AZO multilayer electrode is a promising transparent S/D scheme for high performance TTFTs.