학술논문
Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography.
Document Type
Article
Author
Knobloch, Joshua L.; McBennett, Brendan; Bevis, Charles S.; Yazdi, Sadegh; Frazer, Travis D.; Adak, Amitava; Nelson, Emma E.; Hernández-Charpak, Jorge N.; Cheng, Hiu Y.; Grede, Alex J.; Mahale, Pratibha; Nova, Nabila Nabi; Giebink, Noel C.; Mallouk, Thomas E.; Badding, John V.; Kapteyn, Henry C.; Abad, Begoña; Murnane, Margaret M.
Source
ACS Applied Materials & Interfaces; 9/14/2022, Vol. 14 Issue 36, p41316-41327, 12p
Subject
Language
ISSN
19448244