부산대학교 도서관

Synchrotron light sources require X‐ray optics with extremely demanding accuracy for the surface profile, with less than 100 nrad slope errors and sub‐nanometre height errors. Such errors are challenging to achieve for aspheres using traditional polishing methods. However, post‐polishing error correction can be performed using techniques such as ion beam figuring (IBF) to improve optics to the desired quality. This work presents a brief overview of the history of IBF, introduces some of the challenges for obtaining such demanding figure errors, and highlights the work done at several in‐house IBF facilities at synchrotron light sources worldwide to obtain state‐of‐the‐art optical quality. [ABSTRACT FROM AUTHOR]