학술논문
Simultaneous micromachining with beam splitting of ultrashort laser pulses at high average power for the productive fabrication of microchannels
Document Type
Article
Author
Source
In Procedia CIRP 2024 124:708-711
Subject
Language
ISSN
2212-8271
Abstract
Laser micromachining with ultrashort laser pulses is a promising approach for the generation of small geometries in the micro-meter scale, such as microchannels for passive fluid transport. The ablation of small structures with high average laser power still poses a challenge when high surface quality is required. In this work, beam splitting with a diffractive optical element (DOE) was used to divide the laser beam of a high-power ultrafast laser into an array of 1x15 spots on the workpiece. Fast scanning of up to 20 m/s perpendicular to the orientation of the array using a Galvanometer-scanner allowed for simultaneous micromachining of multiple microchannels with high surface quality on cemented tungsten carbide. The high average laser power of 160 W in combination with the adapted processing strategy enabled the simultaneous and productive fabrication of 15 microchannels with a low surface roughness of Sa < 1.5 µm along the channel wall.